Elmurotova Dilnoza Baxtiyorovna, O.N.J.A.G.X. 2026. Effect of Low-Energy Ion Implantation on Semiconductors . American Journal of Bioscience and Clinical Integrity. 3, 2 (Feb. 2026), 79–85. DOI:https://doi.org/10.51699/ajbci.v3i2.2070.